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Ammonium Fluoride, 40 %, 10 ppb Grade (CMP) - Datasheet

MAXIMUM LIMIT OF IMPURITIES, PPB  
Chloride (Cl)

2000 ppb

< 2000 ppb

Phosphate (PO4)

500 ppb

< 500 ppb

Sulfate (SO4

1000 ppb

< 1000 ppb

Nitrate (NO3) 

3000 ppb

 < 3000 ppb

Arsenic & Antimony (as As)

 10 ppb

< 1 ppb

Barium (Ba)

10 ppb

< 1 ppb

Boron (B)

10 ppb

< 1 ppb

Cadmium (Cd)

10 ppb

 < 1 ppb

Calcium (Ca)

10 ppb

< 3 ppb

Chromium (Cr)

10 ppb

< 1 ppb

Cobalt (Co) 

10 ppb

 < 1 ppb

Copper (Cu)

10 ppb

< 1 ppb

Gallium (Ga) 

10 ppb

 < 1 ppb

Germanium (Ge) 

10 ppb

< 1 ppb

Gold (Au)

10 ppb

< 1 ppb

Iron (Fe)

10 ppb

< 2 ppb

Lead (Pb)

10 ppb

< 1 ppb

Lithium (Li)

10 ppb

< 1 ppb

Magnesium (Mg)

10 ppb

< 1 ppb

Manganese (Mn)

10 ppb

< 1 ppb

Molybdenum (Mo)

10 ppb

< 1 ppb

Nickel (Ni)

10 ppb

< 1 ppb

Potassium (K)

10 ppb

< 1 ppb

Silver (Ag)

10 ppb

< 1 ppb

Sodium (Na)

10 ppb

< 2 ppb

Strontium (Sr)

10 ppb

< 1 ppb

Tin (Sn)

10 ppb

< 1 ppb

Titanium (Ti)

10 ppb

< 1 ppb

Zinc (Zn)

10 ppb

< 1 ppb

PARTICLE COUNT 

 

>0.5mm, #/ml max (drums)

150

< 50






Ammonium Fluoride, 40 %, 10 ppb Grade (CMP) - Properties

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