Fluorine Specialties

Our new range of high-performance process gases for the semiconductor, LCD and solar industry – Fluorine, SIFREN^®, COF2 help to meet the challenge of reducing greenhouse emissions in both etching and cleaning processes.

F1EC is the additive for electrolytes to improve the safety of rechargeable lithium ion batteries. The automotive industry has used Fluorine for surface treatment in plastic fuel tanks for many years.

SF6 is the inert insulation gas for high and medium voltage switch gears.

Carbonyl difluoride COF2

Electronics: Cleaning Gases

Carbonyl difluoride has GWP=1 and can replace PFCs in chamber cleaning and in etching processes.

Electronic Grade Ammonium Fluoride

Electronics: High Performance Solution

Electronic Grade Ammonium Fluoride

Electronic Grade Hydrofluoric Acid

Electronics: High Performance Solution

Electronic Grade Hydrofluoric Acid is available in two grades.

Elemental Fluor technical grade

Elemental Fluor

Elemental Fluor (F2) is used for the fluorination of plastic fuel tanks and the finishing of plastic surfaces.

Elemental Fluorine (F2) electronic grade

Electronics: Cleaning Gases

Elemental Fluorine (F2) is used to clean CVD tools from deposition within the chamber, which was caused by the CVD process.

Iodine pentafluoride

Iodine pentafluoride is a colourless liquid with a pungent odour. The highly reactive IF5 (melting point 9.4 °C) is distillable at 100.5 °C without any decomposition. Decomposition commences at temperatures above 400 °C. In contact with water, iodinepentafluoride hydrolyses spontaneously.

Sifren® 46

Electronics: Cleaning Gases

Sifren^® 46 (C4F6 or Hexafluorobutadiene) C4F6 has a GWP=0 and it is the most advanced etching gas for critical applications. Its low C/F ratio and its insaturations allow achieving the highest aspect ratios in etching.

Sulphur Hexafluoride electronic grade

Electronics: Cleaning Gases

Sulphur Hexafluoride (SF₆) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems).

Sulphur Hexafluoride technical grade

Sulphur Hexafluoride (SF₆) is a non-toxic, inert, insulating and cooling gas of high dielectric strength and thermal stability. It is used for electrical engineering and foundry practice.