Elemental Fluorine (F2) electronic grade

Elemental Fluorine (F2) is used to clean CVD tools from deposition within the chamber, which was caused by the CVD process.

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Description

F2 high purity gas is used as a more efficient cleaning gas compared to NF3. Furthermore the GWP (Global Warming Potential) is zero compared to NF3 17900.

Contact

Asia-Pacific

Solvay Korea CO., LTD

ASIA.Fluorides@solvay.com

Office: +82 52 231-0020

Europe - Middle East - Africa - South America

Solvay Fluor GmbH

EMEA.Fluorides@solvay.com

Office: +49 511 857-2460

Japan

Nippon Solvay K.K.

hiroshi.meguro@solvay.com

Office: +81 3 5425 4310

North America

Solvay Fluorides, LLC

solvaychemicals.us@solvay.com

Office: +1 800 245 4865

Elemental Fluorine (F2) electronic grade

Description

Product Description

Uses

Physical & Chemical Data