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Solvay Chemicals > Products > Fluor Products > Fluorine Specialties > Carbonyl difluoride COF2
Skip Navigation LinksSolvay Chemicals > EN > Products > Fluor Products > Fluorine Specialties > Carbonyl difluoride COF2


 

Carbonyl difluoride COF2 

Electronics: Cleaning Gases

Carbonyl difluoride has GWP=1 and can replace PFCs in chamber cleaning and in etching processes.
 
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